Customer-driven Innovation.

innoPad is your CMP pad partner of the future. Today we offer drop-in alternatives to the industry standard product based on a novel technology platform. With process optimization innoPad CMP pads will deliver superior performance versus the benchmark. With close collaboration and partnership, our patented micro-groove^TM technology platform and single pad manufacturing process allow us to customize a pad solution specific to your most demanding process needs.

Micro-groove^TM Technology Platform

innoPad's patented micro-groove^TM technology platform is an entirely new approach to pad design. Our next generation material architecture gives our engineers unprecedented control over the precise surface and bulk properties of our CMP pads – and our manufacturing facilities the ability to repeatedly produce consistent, high quality pads that meet the most demanding customer needs.